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Metrology, Inspection, And Process Control for Microlithography XIX : Proceedings of SPIE Volume 5752 - 3 Volume Set

Silver, Richard M.

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ISBN 10: 0819457329 / ISBN 13: 9780819457325
Published by SPIE, 2005
Used Condition: Very Good Condition Soft cover
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Bibliographic Details

Title: Metrology, Inspection, And Process Control ...

Publisher: SPIE

Publication Date: 2005

Binding: Soft cover

Book Condition:Very Good Condition

Book Type: Book

About this title


Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

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