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Modelling of Microfabrication Systems

Raja Nassar

Published by Springer-Verlag Berlin and Heidelberg GmbH & Co. K
ISBN 10: 3642055362 / ISBN 13: 9783642055362
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Title: Modelling of Microfabrication Systems

Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. K

Binding: Paperback

Book Condition: New

Book Type: Paperback

Description:

Paperback. 269 pages. Dimensions: 8.9in. x 6.3in. x 0.9in.This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography. This item ships from multiple locations. Your book may arrive from Roseburg,OR, La Vergne,TN. Bookseller Inventory # 9783642055362

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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

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This book addresses modeling of systems that are important to the fabrication of three-dimensional microstructures. Selected topics are ion beam micromachining, x-ray lithography, laser chemical vapor deposition, photopolymerization, laser ablation, and thin films. Models simulating the behavior of these systems are presented, graphically illusratted, and discussed in the light of experimental results. Knowledge gained from such models is essential for system operation and optimization. This book is unique in that it focuses on high aspect ratio microtechnology. It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications.

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