Stock Image

Optical Characterization of Epitaxial Semiconductor Layers

0 ratings by Goodreads
ISBN 10: 364279680X / ISBN 13: 9783642796807
Published by Springer
New Condition: New Soft cover
From BuySomeBooks (Las Vegas, NV, U.S.A.)

AbeBooks Seller Since May 21, 2012 Seller Rating 5-star rating

Quantity Available: > 20

Buy New
List Price: US$ 139.99
Price: US$ 162.51 Convert Currency
Shipping: Free Within U.S.A. Destination, rates & speeds
Add to basket

30 Day Return Policy

About this Item

429 pages. Dimensions: 8.9in. x 6.1in. x 1.0in.The last decade has witnessed an explosive development in the growth of epitaxial layers and structures partially with atomic scale dimensions. This progress has created new demands for the characterization of those structures. Various methods have been refined and new ones were developed with the main emphasis on non-destructive in-situ characterization. Among those, methods which rely on the interaction of electromagnetic radiation with matter are particularly valuable. In this book standard methods such as far-infrared spectroscopy, ellipsometry, Raman scattering, and high-resolution X-ray diffraction are presented, as well as new advanced techniques which provide the potential for better in-situ characterization of epitaxial structures. This item ships from multiple locations. Your book may arrive from Roseburg,OR, La Vergne,TN. Bookseller Inventory # 9783642796807

Ask Seller a Question

Bibliographic Details

Title: Optical Characterization of Epitaxial ...

Publisher: Springer

Binding: Paperback

Book Condition:New

Book Type: Paperback

About this title

Synopsis:

The characterization of epitaxial layers and their surfaces has benefitted a lot from the enormous progress of optical analysis techniques during the last decade. In particular, the dramatic improvement of the structural quality of semiconductor epilayers and heterostructures results to a great deal from the level of sophistication achieved with such analysis techniques. First of all, optical techniques are nondestructive and their sensitivity has been improved to such an extent that nowadays the epilayer analysis can be performed on layers with thicknesses on the atomic scale. Furthermore, the spatial and temporal resolution have been pushed to such limits that real time observation of surface processes during epitaxial growth is possible with techniques like reflectance difference spectroscopy. Of course, optical spectroscopies complement techniques based on the inter­ action of electrons with matter, but whereas the latter usually require high or ultrahigh vacuum conditions, the former ones can be applied in different environments as well. This advantage could turn out extremely important for a rather technological point of view, i.e. for the surveillance of modern semiconductor processes. Despite the large potential of techniques based on the interaction of electromagnetic waves with surfaces and epilayers, optical techniques are apparently moving only slowly into this area of technology. One reason for this might be that some prejudices still exist regarding their sensitivity.

From the Back Cover:

The last decade has witnessed an explosive development in the growth of expitaxial layers and structures with atomic-scale dimensions. This progress has created new demands for the characterization of those stuctures. Various methods have been refined and new ones developed with the main emphasis on non-destructive in-situ characterization. Among those, methods which rely on the interaction of electromagnetic radiation with matter are particularly valuable. In this book standard methods such as far-infrared spectroscopy, ellipsometry, Raman scattering, and high-resolution X-ray diffraction are presented, as well as new advanced techniques which provide the potential for better in-situ characterization of epitaxial structures (such as reflection anistropy spectroscopy, infrared reflection-absorption spectroscopy, second-harmonic generation, and others). This volume is intended for researchers working at universities or in industry, as well as for graduate students who are interested in the characterization of semiconductor layers and for those entering this field. It summarizes the present-day knowledge and reviews the latest developments important for future ex-situ and in-situ studies.

"About this title" may belong to another edition of this title.

Store Description

BuySomeBooks is great place to get your books online. With over eight million titles available we're sure to have what you're looking for. Despite having a large selection of new books available for immediate shipment and excellent customer service, people still tell us they prefer us because of our prices.

Visit Seller's Storefront

Terms of Sale:

We guarantee the condition of every book as it's described on the Abebooks web
sites. If you're dissatisfied with your purchase (Incorrect Book/Not as
Described/Damaged) or if the order hasn't arrived, you're eligible for a refund
within 30 days of the estimated delivery date. If you've changed your mind about a book that you've ordered, please use the Ask bookseller a question link to contact us and we'll respond within 2 business days.

BuySomeBooks is operated by Drive-On-In, Inc., a Nevada co...

More Information
Shipping Terms:

Orders usually ship within 1-2 business days. Books are shipped from multiple locations so your order may arrive from Las Vegas,NV, Roseburg,OR, La Vergne,TN, Momence,IL, or Commerce,GA.

List this Seller's Books

Payment Methods
accepted by seller

Visa Mastercard American Express