Organometallic Vapor-Phase Epitaxy: Theory and Practice

Stringfellow, Gerald B.

Published by Academic Press, 1989
ISBN 10: 0126738408 / ISBN 13: 9780126738407
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Former library copy with associated markings. PAGES- damage from previous wetness on all pgs.- associated stains and rippling (no pgs. stuck together); other (minor) stains; other bends; several text-markings, no notes; no tears. COVER (no jacket- as issued?)- average wear- scratches, edges worn with few small tears; few minor blemishes. Academic Press, 1989. 398 pgs. Bookseller Inventory #

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Synopsis: Here is one of the first single-author treatments of organometallic vapor-phase epitaxy (OMVPE)--a leading technique for the fabrication of semiconductor materials and devices. Also included are metal-organic molecular-beam epitaxy (MOMBE) and chemical-beam epitaxy (CBE) ultra-high-vacuum deposition techniques using organometallic source molecules. Of interest to researchers, students, and people in the semiconductor industry, this book provides a basic foundation for understanding the technique and the application of OMVPE for the growth of both III-V and II-VI semiconductor materials and the special structures required for device applications. In addition, a comprehensive summary detailing the OMVPE results observed to date in a wide range of III-V and II-VI semiconductors is provided. This includes a comparison of results obtained through the use of other epitaxial techniques such as molecular beam epitaxy (MBE), liquid-phase epitaxy (LPE), and vapor phase epitaxy using halide transport.

From the Back Cover: Organometallic vapor phase epitaxy is the major technique used for the commercial production of compound semiconductor materials for devices such as light emitting diodes, laser diodes, solar cells, photo cathodes, and many others. The use of this technique has been expanding rapidly during the last decade and has only recently reached a state of maturity. This is the only single-author book treating the entire scope of OMVPE from the fundamental aspects of the technique to applications for individual, specific materials, structures and devices. Thus, this book will be useful as a teaching tool for people unfamiliar with the field. It will be widely used as a text for advanced level epitaxial growth courses. It will also be useful for the practicing engineer using OMVPE―giving not only a description of the fundaments of OMVPE, but also lists of the characteristics of the technique, the properties of commonly used precursors, etc., as well as descriptions of specific recipes for the production of specific materials.

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Bibliographic Details

Title: Organometallic Vapor-Phase Epitaxy: Theory ...
Publisher: Academic Press
Publication Date: 1989
Binding: Hardcover
Book Condition: Fair

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Stringfellow, Gerald B.
Published by Academic Press (1989)
ISBN 10: 0126738408 ISBN 13: 9780126738407
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Stringfellow, Gerald B.
Published by Academic Press (1989)
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Stringfellow, Gerald B.
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