Precision Motion Control: Design and Implementation (Advances in Industrial Control)

Tan, Kok K., Lee, Tong H., Dou, Huifang, Huang, Sunan

Published by Springer, 2001
ISBN 10: 1852333286 / ISBN 13: 9781852333287
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Synopsis: Precision manufacturing is a development that has been gathering momentum over the last century and accelerating over the last 25 years in terms of research, development, and application to product innovation. The driving force in this development arises from requirements for much higher performance of products, higher reliability, longer life, lower cost, and miniaturization. This development is widely known as precision engineering and, today, it is generally defined as manufacturing to tolerances which are better than one part in 105. Applications are abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), Coordinate Measuring Machines (CMMs) and precision metrology systems (e.g., Scanning Probe Microscopy (SPM)), and robot/machine tools to carry out micro-assembly (e.g., MEMS) and delicate short wavelength laser processes.
As an enabling technology for precision engineering, precision instrumentation and measurement, geometrical calibration and compensation, and motion control are directly important issues to be addressed in the overall system design and realization. This book is focused on these aspects of precision engineering. It is a compilation of the major results and publications from a major project which develop a state-of-the-art high-speed, ultra-precision robotic system. A comprehensive and thorough treatment of the subject matter is provided in a manner that is amenable to a broad base of readers, ranging from the academics to the practitioners, by providing detailed experimental verifications of the developed materials.

From the Back Cover: Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g., scanning probe microscopy), and robot/machine tools to carry out micro-assembly (e.g., micro-electro-mechanical systems) and delicate short-wavelength laser processes. Precision Motion Control (second edition) focuses on enabling technologies for precision engineering - issues of direct importance to be addressed in the overall system design and realization: precision instrumentation and measurement, geometrical calibration and compensation, and motion control. It is a compilation of the most important results and publications from a major project that develops a state-of-the-art, high-speed, ultra-precision robotic system. The second edition has been extensively edited and rewritten throughout with the following particular areas being expanded or added: · piezoelectric actuators; · fine movement control; · gantry-stage control; · interpolation of quadrature encoder signals; · geometrical error modelling for single-, dual- and general-XY-axis stages. By providing detailed experimental verifications of the material developed, a comprehensive and thorough treatment of the subject matter is provided in a manner that is accessible to a broad base of readers, ranging from academics to practitioners.   Praise for the first edition: ...a refreshing and much needed addition to the field of precision engineering... well written, readable, and concise yet comprehensive.                                                   International Journal of Robust and Nonlinear Control ...an excellent single source of essential topics related to precision motion control.                                                                                               Applied Mechanics Reviews   Advances in Industrial Control aims to report and encourage the transfer of technology in control engineering. The rapid development of control technology has an impact on all areas of the control discipline. The series offers an opportunity for researchers to present an extended exposition of new work in all aspects of industrial control.

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Title: Precision Motion Control: Design and ...
Publisher: Springer
Publication Date: 2001
Book Condition: very good

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Tan, Kok K., Lee, Tong H., Dou, Huifang, Huang, Sunan
Published by Springer (2001)
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Book Description Springer, 2001. Book Condition: Good. 1st Edition. Former Library book. Shows some signs of wear, and may have some markings on the inside. Bookseller Inventory # GRP3570750

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Tan, Kok K., Lee, Tong H., Dou, Huifang, Huang, Sunan
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Book Description Springer. Book Condition: Good. Ex-library, so some stamps and wear, but in good overall condition. Bookseller Inventory # Z1-T-036-00165

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Kiong, T K et al
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Book Description Springer, 2001. Book Condition: Good. This is an ex-library book and may have the usual library/used-book markings inside.This book has hardback covers. In good all round condition. Bookseller Inventory # 6032763

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Kiong, Tan Kok; Heng, Dou Huifang; Sunan, Huang
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Book Description Springer-Verlag, London, 2001. Hard Cover. Book Condition: Very Good. No Jacket. First Edition. No dustwrapper (as issued). A very good clean tight copy, with no bumping to the spine ends or corners, of this hard-cover book, part of the publisher's ''Advances in Industrial Control'' series. 232pp, 175 diagrams. Size: 8vo - over 7¾" - 9¾" tall. Bookseller Inventory # kw5730

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