Reaction-diffusion in high-k dielectrics on Si (Surface Science Reports, Vol 49, Nos 1-3, February 2003)

R.M.C.; Baumvol, I.J.R. de Almeida

Published by North-Holland Elsevier, 2003
Used Condition: Fine Paperback
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Publisher: North-Holland Elsevier Date of Publication: 2003 Binding: soft cover Edition: Condition: As New Description: Three issues combined into one publication. Chapters (9): Introduction; Reaction-diffusion models; A case study on high-k dielectrics-atomic transport in aluminum oxide films on Si; Reaction-diffusion in zirconium oxide, silicates & aluminates; Reaction-diffusion in gadolinium oxide & silicates; Reaction-diffusion in lanthanum & yttrium oxides; Reaction-diffusion in hafnium oxide, oxynitrides, & silicates; Interfacial layers-growth & evolution; Conclusions & future prospects for research; References. Tables, illustrations, some b/w photos. pp 1-114. Bookseller Inventory # 003527

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Title: Reaction-diffusion in high-k dielectrics on ...

Publisher: North-Holland Elsevier

Publication Date: 2003

Binding: Paperback

Book Condition:Fine

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