Order Total (1 Item Items):
Shipping Destination:
Handbook Vlsi Microlithography Principles (13 results)
Feedback
Skip to main search results
Search filters
Product Type
- All Product Types
- Books (13)
- Magazines & Periodicals (No further results match this refinement)
- Comics (No further results match this refinement)
- Sheet Music (No further results match this refinement)
- Art, Prints & Posters (No further results match this refinement)
- Photographs (No further results match this refinement)
- Maps (No further results match this refinement)
- Manuscripts & Paper Collectibles (No further results match this refinement)
Condition
Binding
- All Bindings
- Hardcover (13)
- Softcover (No further results match this refinement)
Collectible Attributes
- First Edition (No further results match this refinement)
- Signed (No further results match this refinement)
- Dust Jacket (No further results match this refinement)
- Seller-Supplied Images (5)
- Not Print on Demand (12)
Language (1)
Free Shipping
Seller Location
Seller Rating
-
Hardcover. Condition: Good. No Jacket. Missing dust jacket; Pages can have notes/highlighting. Spine may show signs of wear. ~ ThriftBooks: Read More, Spend Less 1.55.
-
Hardcover. Condition: new. Excellent Condition.Excels in customer satisfaction, prompt replies, and quality checks.
-
Handbook of VLSI Microlithography: Principles, Technology and Applications (Materials Science and Process Technology) [Hardcover] Glendinning, William B. and Helbert, John N.
Seller: Hay-on-Wye Booksellers, Hay-on-Wye, HEREF, United Kingdom
Seller rating 5 out of 5 stars
US$ 27.79
Convert currencyUS$ 26.99 shipping from United Kingdom to U.S.A.Quantity: 1 available
Add to basketCondition: As New.
-
Condition: New. This is a Brand-new US Edition. This Item may be shipped from US or any other country as we have multiple locations worldwide.
-
Condition: Brand New. New. US edition. Expediting shipping for all USA and Europe orders excluding PO Box. Excellent Customer Service.
-
Handbook of VLSI Microlithography: Principles, Technology and Applications (Materials Science and Process Technology)
Published by William Andrew 1991-01-01, 1991
ISBN 10: 0815512813 ISBN 13: 9780815512813
Language: English
US$ 53.52
Convert currencyUS$ 20.90 shipping from United Kingdom to U.S.A.Quantity: Over 20 available
Add to basketHardcover. Condition: New.
-
US$ 61.98
Convert currencyUS$ 13.50 shipping from United Kingdom to U.S.A.Quantity: 2 available
Add to basketHardcover. Condition: Brand New. 1st edition. 671 pages. 10.00x6.75x2.25 inches. In Stock.
-
US$ 71.77
Convert currencyUS$ 2.64 shipping within U.S.A.Quantity: Over 20 available
Add to basketCondition: New.
-
US$ 83.11
Convert currencyUS$ 2.64 shipping within U.S.A.Quantity: Over 20 available
Add to basketCondition: As New. Unread book in perfect condition.
-
Handbook of Vlsi Microlithography : Principles, Technology and Applications
Seller: GreatBookPricesUK, Woodford Green, United Kingdom
Seller rating 5 out of 5 stars
US$ 71.69
Convert currencyUS$ 20.24 shipping from United Kingdom to U.S.A.Quantity: Over 20 available
Add to basketCondition: New.
-
Handbook of VLSI Microlithography: Principles, Technology and Applications (Materials Science and Process Technology)
Seller: Ria Christie Collections, Uxbridge, United Kingdom
Seller rating 5 out of 5 stars
US$ 77.15
Convert currencyUS$ 16.17 shipping from United Kingdom to U.S.A.Quantity: Over 20 available
Add to basketCondition: New. In.
-
Handbook of Vlsi Microlithography : Principles, Technology and Applications
Seller: GreatBookPricesUK, Woodford Green, United Kingdom
Seller rating 5 out of 5 stars
US$ 84.37
Convert currencyUS$ 20.24 shipping from United Kingdom to U.S.A.Quantity: Over 20 available
Add to basketCondition: As New. Unread book in perfect condition.
-
Handbook of VLSI Microlithography : Principles, Technology and Applications
Published by Elsevier Science & Technology, William Andrew, 1991
ISBN 10: 0815512813 ISBN 13: 9780815512813
Language: English
US$ 78.88
Convert currencyUS$ 39.56 shipping from Germany to U.S.A.Quantity: 2 available
Add to basketBuch. Condition: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely covered -- including an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.
