FUNDAMENTALS OF MICROFABRICATION: SCIENCE OF MINIATURIZATION 2/E

MADOU, MARC

ISBN 10: 0849308267 / ISBN 13: 9780849308260

Published by CRC Press, 2002

About this Item

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. A best seller in its first edition, this revision reflects the many developmens in methods, materials, and applications that have recently emerged. Its many refinements include: - Updated and enhanced dismussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology. - In-depth coverage of bio-MEMS, high-temperature MEMS, and optical MEMS. - Many more links to relevant Web sites. - Problem sets within each chapter. 1980 gr.

Seller Inventory # 9780849308260LEA31725

Bibliographic Details

• Title: FUNDAMENTALS OF MICROFABRICATION: SCIENCE OF MINIATURIZATION 2/E
• Publisher: CRC Press
• Publication Date: 2002
• Language: English
• ISBN 10: 0849308267
• ISBN 13: 9780849308260
• Binding: Dura
• Illustrator: No Aplica
• Edition: 2.
• Condition: New
• Dust Jacket Condition: Nuevo
• Weight: 1980 grams
• Book Type: Libro

About this title

Synopsis

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

New in the Second Edition

Revised chapters that reflect the many recent advances in the field

Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology

In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.

Many more links to the Web

Problem sets in each chapter

About the Author

University of California, Irvine, USA