MEMS and MOEMS Technology and Applications (SPIE Press Monograph Vol. PM85) - Hardcover

Prosenjit Rai-Choudhury

Hardcover

ISBN 10: 0819437166 ISBN 13: 9780819437167

Publisher: SPIE Publications, 2000

Synopsis

Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). Useful as a professional reference, technology user's guide, and as a textbook.

Contents

- Preface
- MEMS/MOEMS Technology Capabilities and Trends
- Operation and Design of MEMS/MOEMS Devices
- Optical Microsystem Modeling and Simulation
- The Digital Micromirror Device: A Micro-Optical Electromechanical Device for Display Applications
- Optical Waveguides and Silicon-Based Micromachined Architectures
- Silicon Micromachines in Optical Communications Networks: Tiny Machines for Large Systems
- Assembly and Test for MEMS and Optical MEMS
- MEMS, Microsystems, Micromachines: Commercializing an Emergent Disruptive Technology
- Index

About this edition

• Publisher: SPIE Publications
• Publication date: 2000
• ISBN 10: 0819437166
• ISBN 13: 9780819437167
• Binding: Hardcover
• Number of pages: 528
• Editor: P. Rai-Choudhury