Fundamentals of Microfabrication - Hardcover

Marc J. Madou

Hardcover

ISBN 10: 0849394511 ISBN 13: 9780849394515

Publisher: CRC-Press, 1997

Synopsis

Fundamentals of Microfabrication is the first book to examine all aspects of the attempt to build functional devices at a molecular size. Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.

About this title

About the Author:

University of California, Irvine, USA

Review:

"... the alpha and omega textbook of micro and nanofabrication and technology. ... Madou’s explanations often provide new perspectives to those who are more experienced. ... this feat of compressing a half century of science and engineering into one set of books makes them useful for years to come. The volumes can easily and aptly serve as course resources for students or as reference books for professionals. Summing Up: Recommended."
―CHOICE Magazine

"... offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."
―Suman Chakraborty, IIT Kharagpur, India

"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."
―Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland

"... [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor... easy to read, and I found some concepts explained in ways I hadn’t heard before... Very ambitious, very informative, very good for teaching!"
―Jorg P. Kutter, Technical University of Denmark

About this edition

• Publisher: CRC-Press
• Publication date: 1997
• ISBN 10: 0849394511
• ISBN 13: 9780849394515
• Binding: Hardcover
• Edition number: 1
• Number of pages: 589