Control of Semiconductor Interfaces: Proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12 - Hardcover
Selected papers from ISCSI-1, held in November 1993. Following two plenary presentations ("Understanding Semiconductor Interfaces" by W.A. Harrison and "Semiconductor Interfaces and Their Implications to VLSI Device Reliability" by Y. Nishi), the technical papers are grouped into topical sections: metal/silicon; semiconductor hetero-interface; characterization; semiconducting new materials; metal/compound semiconductor; SiO 2/Si; insulator/semiconductor; interface in device; control of interface formation, properties, contact metallization, and characterization Si; and control of interface formation, properties, contact metallization, and characterization compound semiconductors. Annotation copyright Book News, Inc. Portland, Or.
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- PublisherElsevier Science Ltd
- Publication date1994
- ISBN 10 0444818898
- ISBN 13 9780444818898
- BindingHardcover
- Number of pages600
- EditorHiraki A.
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Control of Semiconductor Interfaces: Proceedings of the First International Symposium on Control of Semiconductor Interfaces, Karuizawa, Japan, 8-12
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Elsevier Science Ltd
(1994)
ISBN 10: 0444818898
ISBN 13: 9780444818898
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