3-Dimensional Process Simulation

Language: English

Published by Springer Vienna, Springer Okt 2011, 2011

3709174309 / 9783709174302

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This item is printed on demand - Print on Demand Titel. Neuware -Whereas two-dimensional semiconductor process simulation has achieved a certain degree of maturity, three-dimensional process simulation is a newly emerging field in which most efforts are dedicated to necessary basic developments. Research in this area is promoted by the growing demand to obtain reliable information on device geometries and dopant distributions needed for three-dimensional device simulation, and challenged by the great algorithmic problems caused by moving interfaces and by the requirement to limit computation times and memory requirements. A workshop (Erlangen, September 5, 1995) provided a forum to discuss the industrial needs, technical problems, and solutions being developed in the field of three-dimensional semiconductor process simulation. Invited presentations from leading semiconductor companies and research Centers of Excellence from Japan, the USA, and Europe outlined novel numerical algorithms, physical models, and applications in this rapidly emerging field.Springer-Verlag KG, Sachsenplatz 4-6, 1201 Wien 212 pp. Englisch.

Seller Inventory # 9783709174302

Title
3-Dimensional Process Simulation
Author
J. Lorenz
Publisher
Springer Vienna, Springer Okt 2011
Publication year
2011
Condition
Neu
Binding
Taschenbuch
Language
English
ISBN 10
3709174309
ISBN 13
9783709174302
Item weight
375 grams
Dimensions
244x170x12 mm

buchversandmimpf2000

Emtmannsberg, BAYE, Germany

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