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Synopsis
This new text introduces the material of each process type by explaining the underlying chemical engineering (and physical) principles. For microelectronic processing courses the text progresses from an overview of microelectronics processing through a logically-sequenced discussion of the processes leading to integrated circuits. The author is very careful to define terms that may be unfamiliar to chemical engineers, to provide numerous examples to aid in their understanding, and to include ample end-of-chapter problems.
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Fundamentals of Microelectronics Processing
Published by
McGraw-Hill Education (ISE Editions), 1990
ISBN 10: 0071007962
ISBN 13: 9780071007962
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Hardcover
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