Materials Science in Microelectronics I: The Relationships Between Thin Film Processing and Structure - Hardcover

Machlin, Eugene

Hardcover

ISBN 10: 008044640X ISBN 13: 9780080446400

Publisher: Elsevier Science, 2005

Synopsis

Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.The first volume of Materials Science in Microelectronics focuses on the first relationship – that between processing and the structure of the thin-film. The state of the thin film’s surface during the period that one monolayer exists - before being buried in the next layer – determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.

Edition details

• Publisher: Elsevier Science
• Publication date: 2005
• Language: English
• ISBN 10: 008044640X
• ISBN 13: 9780080446400
• Binding: Hardcover
• Edition number: 2
• Number of pages: 270