VLSI Electronics (Volume 1) (VLSI Electronics Microstructure Science, Volume 1) - Hardcover

Clayson, D B

 
9780122341014: VLSI Electronics (Volume 1) (VLSI Electronics Microstructure Science, Volume 1)

Synopsis

VLSI Electronics: Microstructure Science, Volume 1 assesses trends for the future of very large scale integration (VLSI) electronics and the scientific base that supports its development. This book discusses the manufacturing process technology for MOS VLSI, principles of optical lithography, and resolution limitations for submicron lithography. The research and resource at the national submicron facility, limitations of small devices and large systems, and physics and modeling of submicron insulated-gate field-effect transistors are also elaborated. This text likewise covers the government role in VLSI and VLSI as a major new tool for productivity improvement. This volume is suitable for scientists and engineers who wish to become familiar with VLSI electronics, device designers concerned with the fundamental character of and limitations to device performance, systems architects who will be charged with tying VLSI circuits together, and engineers conducting work on the utilization of VLSI circuits in specific areas of application.

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Other Popular Editions of the Same Title

9780122341137: VLSI Electronics Microstructure Science. Volume 13: Metal-Semiconductor Contacts and Devices

Featured Edition

ISBN 10:  0122341139 ISBN 13:  9780122341137
Publisher: Academic Pr, 1986
Hardcover