Items related to Rapid Thermal Processing: Science and Technology
Synopsis
This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
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- PublisherAcademic Press
- Publication date1993
- ISBN 10 0122476905
- ISBN 13 9780122476907
- BindingHardcover
- LanguageEnglish
- Edition number1
- Number of pages430
- EditorFair Richard B.
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Rapid Thermal Processing: Science and Technology
Published by
Elsevier Science Publishing Co Inc, 1993
ISBN 10: 0122476905
ISBN 13: 9780122476907
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Rapid Thermal Processing: Science and Technology
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Gebunden. Condition: New. Discusses rapid thermal processing (RTP), an essential manufacturing technology for single-wafer processing in highly controlled environments. The text provides information on the suitability of RTP for thin film deposition, junction formation, silicides, e. Seller Inventory # 594356338
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