PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing - Softcover

9780123911766: PVD for Microelectronics: Sputter Desposition to Semiconductor Manufacturing

Softcover

ISBN 10: 0123911761 ISBN 13: 9780123911766

Publisher: Academic Press, 2011

GENERAL DESCRIPTION OF THE SERIES Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 25 volumes since 1963. The series contains quality studies of the properties of various thin films materials and systems. In order to be able to reflect the development of today's science and to cover all modern aspects of thin films, the series, starting with Volume 20, has moved beyond the basic physics of thin films. It now addresses the most important aspects of both inorganic and organic thin films, in both their theoretical as well as technological aspects. Therefore, in order to reflect the modern technology-oriented problems, the title has been slightly modified from Physics of Thin Films to Thin Films. GENERAL DESCRIPTION OF THE VOLUME This volume, part of the Thin Films Series, has been wholly written by two authors instead of showcasing several edited manuscripts.

"synopsis" may belong to another edition of this title.