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Synopsis
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
- Allows the user to optimize turn-key operation of ellipsometers and move beyond limited turn-key applications
- Provides comprehensive discussion of the measurement of film thickness and optical constants in film
- Discusses the trajectories of the ellipsometric parameters Del and Psi and how changes in the materials affect the parameter
- Includes 14 case studies to reinforce specific applications
- Includes three appendices for helpful references
"synopsis" may belong to another edition of this title.
- PublisherAcademic Press
- Publication date1992
- ISBN 10 0126939500
- ISBN 13 9780126939507
- BindingHardcover
- LanguageEnglish
- Edition number1
- Number of pages260
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A User's Guide to Ellipsometry
Seller: The Book Corner, Beaverton, OR, U.S.A.
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hardcover. Condition: Very Good. Hardback. No dust jacket. Cover edges and corners in good shape. Spine is tight. Former owner's name inside front cover Pages are clean, no markings, notes or stains. Ships from Friends bookstore to benefit Beaverton (Oregon) library. Seller Inventory # mon0000061385
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A User's Guide to Ellipsometry
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Hardcover. Condition: Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority! Seller Inventory # S_377864099
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A User's Guide to Ellipsometry
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Hardcover. Condition: Good. No Jacket. Pages can have notes/highlighting. Spine may show signs of wear. ~ ThriftBooks: Read More, Spend Less 1.23. Seller Inventory # G0126939500I3N00
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A Users Guide to Ellipsometry
Seller: BoundlessBookstore, Wallingford, United Kingdom
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Condition: Very Good. VG condition book without dust jacket. Boards are clean with little wear. Book has clean and bright contents, pen and previous owner stamp front endpaper, 260pp with illustrations. Seller Inventory # 9999-9994450153
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A USER'S GUIDE TO ELLIPSOMETRY.
Seller: PASCALE'S BOOKS, NORTH READING, MA, U.S.A.
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Hard Cover. Condition: Fine-. 260 pages. "Ellipsometry is a very old technque for studying surfaces and thein films. It is also used extensively in integrated circuit(IC) manufacture and development, in corrosion science, and various other areas. The fundamental principles of the technqiues are well known. Although the literature is extensive, the few available books deal with the subect on a level that is too mathematical or theoretical for most casual users. FINE- HARDCOVER, black cloth covers, lettering is bright on the spine and cover. Size: 8vo - over 7¾" - 9¾" tall. Seller Inventory # 028511
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A User's Guide to Ellipsometry
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hardcover. Condition: New. In shrink wrap. Looks like an interesting title! Seller Inventory # Q-0126939500
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A User*s Guide to Ellipsometry
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Hardcover. Condition: Good. Good. book. Seller Inventory # D7S9-1-M-0126939500-4
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A User's Guide to Ellipsometry
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Hardcover. Condition: new. Excellent Condition.Excels in customer satisfaction, prompt replies, and quality checks. Seller Inventory # Scanned0126939500
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