Items related to The Science and Engineering of Microelectronic Fabrication...
The Science and Engineering of Microelectronic Fabrication (The ^AOxford Series in Electrical and Computer Engineering) - Hardcover
Synopsis
The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be used as a textbook for both first year graduate and upper level undergraduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, nonoptical lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The book also makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest.
"synopsis" may belong to another edition of this title.
About the Author
Stephen A. Campbell, Associate Professor of Electrical Engineering in the Department of Electrical Engineering, University of Minnesota.
"About this title" may belong to another edition of this title.
Search results for The Science and Engineering of Microelectronic Fabrication...
Stock Image
The Science and Engineering of Microelectronic Fabrication (The Oxford Series in Electrical and Computer Engineering)
Published by
Oxford University Press, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
Used
Hardcover
Seller: World of Books (was SecondSale), Montgomery, IL, U.S.A.
Seller rating 4 out of 5 stars
Condition: Acceptable. Item in very good condition! Textbooks may not include supplemental items i.e. CDs, access codes etc. Seller Inventory # 00074089260
Quantity: 1 available
Stock Image
The Science and Engineering of Microelectronic Fabrication (The ^AOxford Series in Electrical and Computer Engineering)
Published by
Oxford University Press (edition ), 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
Used
Hardcover
Seller: BooksRun, Philadelphia, PA, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Fair. The item might be beaten up but readable. May contain markings or highlighting, as well as stains, bent corners, or any other major defect, but the text is not obscured in any way. Seller Inventory # 0195105087-7-1
Quantity: 1 available
Stock Image
The Science and Engineering of Microelectronic Fabrication (The ^AOxford Series in Electrical and Computer Engineering)
Published by
Oxford University Press, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
Used
Hardcover
Seller: ThriftBooks-Dallas, Dallas, TX, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Fair. No Jacket. Readable copy. Pages may have considerable notes/highlighting. ~ ThriftBooks: Read More, Spend Less 2.55. Seller Inventory # G0195105087I5N00
Quantity: 1 available
Stock Image
The Science and Engineering of Microelectronic Fabrication (The ^AOxford Series in Electrical and Computer Engineering)
Published by
Oxford University Press, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
Used
Hardcover
Seller: HPB-Red, Dallas, TX, U.S.A.
Seller rating 5 out of 5 stars
hardcover. Condition: Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority! Seller Inventory # S_434409613
Quantity: 1 available
Stock Image
The Science and Engineering of Microelectronic Fabrication
Published by
Oxford University Press, Incorporated, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
Used
Hardcover
Seller: Better World Books, Mishawaka, IN, U.S.A.
Seller rating 5 out of 5 stars
Condition: Very Good. Used book that is in excellent condition. May show signs of wear or have minor defects. Seller Inventory # 11224431-75
Quantity: 1 available
Stock Image
The Science and Engineering of Microelectronic Fabrication
Published by
Oxford University Press, Incorporated, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
Used
Hardcover
Seller: Better World Books, Mishawaka, IN, U.S.A.
Seller rating 5 out of 5 stars
Condition: Good. Used book that is in clean, average condition without any missing pages. Seller Inventory # 4384494-6
Quantity: 1 available
Stock Image
The Science and Engineering of Microelectronic Fabrication (The Oxford Series in Electrical and Computer Engineering)
Published by
Oxford University Press, New York
ISBN 10: 0195105087
ISBN 13: 9780195105087
Used
Hardcover
First Edition
Seller: Alien Bindings, BALTIMORE, MD, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Good. No Jacket. First Edition. Hardcover edition in Good+ condition. There are sparse highlights and underlining in ink; otherwise, the book is in Very Good condition. The covers are in great shape. The edges of the text block are stamped. The binding is square and tight. Small abrasion to the front flyleaf. The book will be carefully packaged for shipment for protection from the elements. USPS electronic tracking number issued free of charge. Seller Inventory # 15114
Quantity: 1 available
Stock Image
The Science and Engineering of Microelectronic Fabrication
Published by
Oxford University Press, Incorporated, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
Used
Hardcover
Seller: Better World Books Ltd, Dunfermline, United Kingdom
Seller rating 5 out of 5 stars
Condition: Good. Ships from the UK. Former library book; may include library markings. Used book that is in clean, average condition without any missing pages. Seller Inventory # GRP30410464
Quantity: 2 available
Stock Image
The Science and Engineering of Microelectronic Fabrication (The Oxford Series in Electrical and Computer Engineering)
Published by
Oxford University Press Inc, 1996
ISBN 10: 0195105087
ISBN 13: 9780195105087
Used
Hardcover
Seller: Anybook.com, Lincoln, United Kingdom
Seller rating 5 out of 5 stars
Condition: Poor. This is an ex-library book and may have the usual library/used-book markings inside.This book has hardback covers. Clean from markings. In poor condition, suitable as a reading copy. No dust jacket. Please note the Image in this listing is a stock photo and may not match the covers of the actual item,1250grams, ISBN:9780195105087. Seller Inventory # 9913964
Quantity: 1 available
Stock Image
The Science and Engineering of Microelectronic Fabrication (The Oxford Series in Electrical and Computer Engineering)
Seller: The Book Spot, Sioux Falls, MN, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: New. Seller Inventory # Abebooks69654
Quantity: 1 available