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The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be used as a textbook for both first year graduate and upper level undergraduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, nonoptical lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The book also makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest.
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Stephen A. Campbell, Associate Professor of Electrical Engineering in the Department of Electrical Engineering, University of Minnesota.Review:
"This book addresses the material in an organized manner. The tool diagrams and photos are very useful. Figures, diagrams, SEMs, TEMs, are plentiful and necessary for this material."--Dr. Susan Marine, Centre College
"Excellent, up-to-date compilation of the physics and engineering of microelectronic chip processing. Good reference book for semiconductor manufacturing labs and engineering libraries. Very well documented."--David Navon, UMass--Amherst
"This is a very attractive book. It has a good balance of science, engineering and technology. The graphical, pictoral and SEM representatives add to the practical value of the book."--H. Thurman Henderson, Department of Electrical and Computer Engineering and Computer Science, University of
"Excellent! New textbooks on this subject appear rarely and with great gaps between appearances. This is the best of the last ten years."-- J.G. Smits, epartment of Electrical and Computer Engineering, Boston University
"Any one chapter could be expanded into a book by itself. An impressive piece of work!"-- Choice
"Appears to represent an excellent balance between practical, 'real world' information and theory. It will serve as an excellent complement to the standard type semiconductor materials and devices course in the realm of engineering applications. Such material should increase student
appreciation and motivation for the field of semiconductors and enhance marketability."--Robert Engelken, Arkansas State University
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Book Description Oxford University Press, USA, 1996. Hardcover. Condition: New. Seller Inventory # DADAX0195105087
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