Over the last 25 years, the performances of semiconductor devices have improved greatly; this book describes the science and technology that have made these advances possible. While mainstream silicon memory and microprocessor chips still work with uniform silicon as the starting point, the whole of both electronic and optical communication relies on multilayer semiconductor structures. The book provides a unified overview of the devices, including the relevant quantum physics and the key breakthroughs in materials science and technology. It is suitable as a text for undergraduates and graduates in physics, materials sciences, or electronics, as well as researchers in the field.
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It is now routine to design and prepare semiconductor multilayers one atomic layer at a time, with independent control over the doping and composition approaching atomic-scale resolution in each layer. In turn, these multilayers can be patterned with features that are as small as only a few atomic layers in lateral extent. These resulting structures not only have led to new generations of electronic and optoelectronic devices offering superior performance, but also have opened up many new areas of exciting solid state and quantum physics. This book collates the whole of semiconductor science and technology relating to semiconductor multilayers since 1970, and points the way towards the ultimate of materials engineering - the design and preparation of solids atom by atom. Materials, technology, physics, and device issues are covered in detail, making this work ideal for physicists, electronic engineers, and materials scientists alike.
Michael Joseph Kelly is at University of Surrey, Guildford.
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