Integrated Processing for Micro- And Optoelectronics: Proceedings of Symposium d on Integrated Processing for Micro- And Optoelectronics of the 1993 ... Research Society Symposia Proceedings) - Hardcover

Symposium D On Beam Processing And Laser Chemistry; Katz, Avishay; Nissim, Yves I.

 
9780444819833: Integrated Processing for Micro- And Optoelectronics: Proceedings of Symposium d on Integrated Processing for Micro- And Optoelectronics of the 1993 ... Research Society Symposia Proceedings)
Hardcover
ISBN 10: 0444819835 ISBN 13: 9780444819833
Publisher: North-Holland, 1994

Synopsis

These proceedings focus on the technology application driving forces for multichamber approaches to semiconductor process sequences, otherwise called cluster tools or integrated processing and present research results upon which these manufacturing technologies are built.

"synopsis" may belong to another edition of this title.

Publisher
North-Holland
Publication date
1994
Language
English
ISBN 10 
0444819835
ISBN 13 
9780444819833
Binding
Hardcover
Number of pages
320
Editor
Rubloff G. W.