Dry etching for microelectronics (Materials processing--theory and practices) - Hardcover

Powell, Ronald A.

Hardcover

ISBN 10: 0444869050 ISBN 13: 9780444869050

Publisher: Distributors for the USA and Canada, Elsevier Science Pub. Co, 1984

Synopsis

This volume collects together for the first time a series of in-depth, critical reviews of important topics in dry etching, such as dry processing of III-V compound semiconductors, dry etching of refractory metal silicides and dry etching aluminium and aluminium alloys. This topical format provides the reader with more specialised information and references than found in a general review article. In addition, it presents a broad perspective which would otherwise have to be gained by reading a large number of individual research papers. An additional important and unique feature of this book is the inclusion of an extensive literature review of dry processing, compiled by search of computerized data bases. A subject index allows ready access to the key points raised in each of the chapters.

Edition details

• Publisher: Distributors for the USA and Canada, Elsevier Science Pub. Co
• Publication date: 1984
• ISBN 10: 0444869050
• ISBN 13: 9780444869050
• Binding: Hardcover
• Language: English
• Number of pages: 299