Spectroscopic Ellipsometry: Principles and Applications

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9780470016084: Spectroscopic Ellipsometry: Principles and Applications
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Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

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Spectroscopic ellipsometry has established its position as ahigh-precision optical-characterization technique —nevertheless, the principles of ellipsometry are often said to bedifficult, partly due to the lack of proper knowledge for polarizedlight used as a probe in ellipsometry.  The objective of thisbook is to provide a fundamental understanding of spectroscopicellipsometry particularly for researchers who are not familiar withthe ellipsometry technique.  Although some aspects of thetechnique are complicated, the understanding is not essentiallydifficult, if one comprehends the principles in order.  Basedon this point of view, this highly-illustrated book providesgeneral descriptions for measurement and data analysis methodsemployed widely in spectroscopic ellipsometry. 

In order to comprehend spectroscopic ellipsometry, however, afundamental knowledge for optics is required.  In the book,therefore, “Principles of Optics” and“Polarization of Light” are described (Chapters 2 and3).  From these two chapters,   the principles ofspectroscopic ellipsometry presented in Chapter 4 can be understoodmore easily.  The author focuses on data analysis in the nextfew chapters: in particular, the principles and physicalbackgrounds of ellipsometry analysis are discussed in detail inChapter 5.  Since there is growing interest for opticalanisotropy, the data analysis of anisotropic materials is explainedin Chapters 6 and the subsequent chapter presents examples ofellipsometry analyses for various materials used in differentfields are described.  In the final chapter, the applicationsof spectroscopic ellipsometry for growth monitoring and feedbackcontrol of processing are addressed.

This book will be appropriate as a text for students as well asresearchers, in institutes and industrial laboratories, inproviding practical information on the applications ofspectroscopic ellipsometry.

About the Author:

Dr Hiroyuki Fujiwara is based at the National Institute of Advanced Industrial Science and Technology, Ibaraki, Japan. He received his PhD at the Tokyo Institute of Technology in 1996 and carried out post-doctoral research with Professor R.W. Collins at Penn State University. From 1998 to present he has been working as a senior research scientist at the Research Center for Photovoltaics at NIAIST. He received the 'Most Promising Young Scientist Award' from the Japan Society of Applied Physics and the 'Young Researcher Award' at the World Conference on Photovoltaic Energy Conversion in 2003.

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Book Description John Wiley and Sons Ltd, United States, 2007. Hardback. Condition: New. Language: English . Brand New Book. Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields. Seller Inventory # AAH9780470016084

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Book Description John Wiley and Sons Ltd, United States, 2007. Hardback. Condition: New. Language: English . Brand New Book. Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields. Seller Inventory # AAH9780470016084

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