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Glow Discharge Processes: Sputtering and Plasma Etching - Hardcover

 
9780471078289: Glow Discharge Processes: Sputtering and Plasma Etching

Synopsis

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

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Brian Chapman is the author of Glow Discharge Processes: Sputtering and Plasma Etching, published by Wiley.

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Chapman, Brian
Published by Wiley-Interscience, 1980
ISBN 10: 047107828X ISBN 13: 9780471078289
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Chapman, Brian
Published by Wiley-Interscience, 1980
ISBN 10: 047107828X ISBN 13: 9780471078289
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Chapman, Brian
Published by Wiley-Interscience, 1980
ISBN 10: 047107828X ISBN 13: 9780471078289
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Chapman, Brian
Published by Wiley-Interscience, 1980
ISBN 10: 047107828X ISBN 13: 9780471078289
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Published by Wiley-Blackwell, 1980
ISBN 10: 047107828X ISBN 13: 9780471078289
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No jacket. Condition: Bon. Ancien livre de bibliothèque avec équipements. Sans jaquette. Couverture différente. Edition 1980. Ammareal reverse jusqu'à 15% du prix net de cet article à des organisations caritatives. ENGLISH DESCRIPTION Book Condition: Used, Good. Former library book. No dust jacket. Different cover. Edition 1980. Ammareal gives back up to 15% of this item's net price to charity organizations. Seller Inventory # G-740-062

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Chapman, Brian
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ISBN 10: 047107828X ISBN 13: 9780471078289
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Chapman, Brian N.
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