Ion Implantation - Hardcover

Ryssel, Heiner; Ingolf, Ruge

 
9780471103110: Ion Implantation

Synopsis

Focuses on ion implantation as a new means of altering the properties of materials, with an emphasis on the doping of semiconductors through ion implantation. Discusses the problems that occur in a variety of applications, including the electrical activation of implanted ions, diffusion effects, the most common measurement methods for examining implanted layers, and requirements for accelerator equipment.

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Language Notes

Text: English, German (translation)

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