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Spectroscopic Ellipsometry and Reflectometry: A User's Guide - Hardcover

 
9780471181729: Spectroscopic Ellipsometry and Reflectometry: A User's Guide

Synopsis

While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.

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About the Author

Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola.

William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.

"About this title" may belong to another edition of this title.

  • PublisherWiley-Interscience
  • Publication date1999
  • ISBN 10 0471181722
  • ISBN 13 9780471181729
  • BindingHardcover
  • LanguageEnglish
  • Edition number1
  • Number of pages248

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Tompkins, Harland G. (Author), McGahan, William A. (Author)
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Hardcover. Condition: new. Hardcover. Ellipsometry is an optical technique used to measure thickness and optical properties of thin films. Single wave ellipsometry has been around for years, but now spectroscopic ellipsometry has entered the mainstream of industrial laboratories. This is a practical introduction to spectroscopic ellipsometry and the related technique of reflectometry. In addition to an introduction to the fundamentals, the book includes applications and case studies. While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. Shipping may be from multiple locations in the US or from the UK, depending on stock availability. Seller Inventory # 9780471181729

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