Microsensors: Principles and Applications

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9780471941361: Microsensors: Principles and Applications

The main microsensors described here are made using conventional thick and thin film technologies as well as more recent methods such as silicon micromachining. Following a chapter on basic signal processing, the book concentrates on microsensors—the processing of materials for their fabrication; the wide range of physical, chemical and mechanical principles employed and the benefits incurred from the application of smart sensors and microsensor array devices. Features numerous examples.

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Gardner, Julian W.
Published by Wiley (1994)
ISBN 10: 0471941360 ISBN 13: 9780471941361
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Julian W. Gardner
Published by Wiley (1994)
ISBN 10: 0471941360 ISBN 13: 9780471941361
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Book Description Wiley, 1994. Paperback. Book Condition: New. book. Bookseller Inventory # M0471941360

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