This volume reflects the rapid evolution of surface analysis techniques involving ion and neural spectroscopies. Sputtering techniques are comprehensively discussed in chapters covering instrumentation, theory, quantification, dynamic and static SIMS and various applications.
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Since the publication of the first edition, practical surface analysis has grown and diversified to such an extent that the editors have found it necessary to produce a new companion volume to cover the fields of ion and neutral spectroscopy. This first volume of the two-volume set discusses two closely related analytical techniques--Auger and X-ray photoelectron spectroscopy. Beginning with historical background of both AES and XPS, it provides in-depth examination of theory and practice of the two techniques. Information on instrumentation, spectral interpretation, depth profiling and quantification are also included. Volume II also discusses the treatment of ion and neutral techniques, but in a different manner because they have less in common than the electron spectroscopies. Volume II includes material on SIMS Instrumentation, dynamic SIMS, and SNMS (sputtered neutral mass spectrometry). Both volumes have numerous appendices.
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