Laser Chemical Processing for Microelectronics (Cambridge Studies in Modern Optics, Series Number 7) - Hardcover

Hardcover

ISBN 10: 0521322545 ISBN 13: 9780521322546

Publisher: Cambridge University Press, 1989

Synopsis

Nine contributors describe the application of laser processing techniques in the fabrication of semiconductor materials and devices for the microelectronics industry. Chapters focus on deposition, etching, doping, and direct write capability (pantography) beginning with a review of the current literature and understanding. Annotation copyright Book News, Inc. Portland, Or.

Edition details

• Publisher: Cambridge University Press
• Publication date: 1989
• Language: English
• ISBN 10: 0521322545
• ISBN 13: 9780521322546
• Binding: Hardcover
• Number of pages: 192
• Editor: Ibbs K. G., Osgood Richard Magee