Nanoscale Standards by Metrological AFM and Other Instruments - Hardcover

Misumi, Ichiko

Hardcover

ISBN 10: 0750331895 ISBN 13: 9780750331890

Publisher: Iop Publishing Ltd, 2021

Synopsis

The purpose of this book is to help semiconductor inspection equipment users and manufacturers understand what nano dimensional standards are used to calibrate their equipment and how to employ them effectively. Reviewing trends and developments in nanoscale standards, the book starts with an introductory overview of nanometrological standards before proceeding to detail pitch standard, step height, line width, nano particle size, and surface roughness. This book is essential for users making quantitative nanoscale measurements, be that in a commercial or academic research setting, or involved in engineering nanometrology for quality control in industrial applications. Here the author provides an approachable understanding and application of the nanoscale standards in a practical context across a range of common nanoscale measurement modalities, including 3D, with particular emphasis on applications to AFM, an exceptional and arguably the most common technique used in nanometrology due to the ease of use and versatility of applications.

Key features

• Practical guide for users and practitioners
• Puts nanoscale standards in a practical context
• Covers a range of measurement modalities
• 2D and 3D measurements.

About this title

About the Author

Dr Misumi graduated with a degree in precision machinery engineering, from the University of Tokyo in 1996 and obtained her Doctor of Engineering from the University of Tokyo in 2004. She joined the National Research Laboratory of Metrology (NRLM) in 2000. In 2001, NRLM was renamed the National Metrology Institute of Japan (NMIJ). She received 'Outstanding Precision Measurement Paper Award 2005' from Measurement Science and Technology, Institute of Physics (IOP), and 'Highly Commended Paper Award 2007', again from Measurement Science and Technology, Institute of Physics (IOP). She also received 'Award for Science and Technology (Development Category), The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology' in 2011.

Edition details

• Publisher: Iop Publishing Ltd
• Publication date: 2021
• Language: English
• ISBN 10: 0750331895
• ISBN 13: 9780750331890
• Binding: Hardcover
• Number of pages: 120