Items related to Metallization: Theory and practice for VLSI and ULSI

Metallization: Theory and practice for VLSI and ULSI - Hardcover

Murarka, Shyam

 
9780750690010: Metallization: Theory and practice for VLSI and ULSI

Synopsis

This title covers fundemental concepts, properties and applicabilities of metals and alloys for use in various metallization schemes. Metallizations form the key components on electronic circuits - controlling device properties and providing power and device interconnections with the outside world or with other devices.


The recent advent of submicron dimensions and increasingly faster devices in the semiconductor have challenged researchers to keep metallization schemes in line with new demanding requirements.

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