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Synopsis
This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to discuss typical problems seen throughout that films' history, including characterization tools which are most effectively used to clarifying and solving those problems.
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Characterization in Silicon Processing
Published by
Saint Louis, Missouri, U.S.A.: Butterworth-Heinemann, 1993
ISBN 10: 0750691727
ISBN 13: 9780750691727
Used
Hardcover
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Hardcover. Condition: Very Good. Hardback in very good condition. Libary stamp on bottom of pages. Seller Inventory # 21838
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