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Microelectromechanical Systems (Mems): Micromechanical Systems, Microscale Energy Transport : Presented at the 1997 International Mechanical ... Exposition, November (Dsc (Series), Vol. 62.) - Hardcover

 
9780791818435: Microelectromechanical Systems (Mems): Micromechanical Systems, Microscale Energy Transport : Presented at the 1997 International Mechanical ... Exposition, November (Dsc (Series), Vol. 62.)

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The proceedings of the November 1997 symposium contain 38 papers on micromechanical systems and microscale energy transport. Part one covers devices and applications; fluidic systems; fabrication and actuators; and characterization and modeling. Part two covers laser absorption by metals and organic

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Chang, W. S., Gopinath, A., Sadhal, S. S., Trinh, E. H. (eds.)
ISBN 10: 0791818438 ISBN 13: 9780791818435
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