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Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology) - Hardcover

 
9780815512202: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

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This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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"The text provides and excellent reference for plasma processing." - SAMPE Journal

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9781493303359: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions

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ISBN 10:  149330335X ISBN 13:  9781493303359
Publisher: William Andrew, 1991
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Rossnagel, Stephen M.; Westwood, William D.; Cuomo, Jerome J.
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Rossnagel, Stephen M.; Westwood, William D.; Cuomo, Jerome J.
Published by William Andrew, 1991
ISBN 10: 0815512201 ISBN 13: 9780815512202
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Rossnagel, Stephen M, and Westwood, William D, and Cuomo, Jerome J
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Stephen M. Rossnagel, William D. Westwood; Jerome J. Cuomo
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Rossnagel, Stephen M., Westwood, William D., Cuomo, Jerome J
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