Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology) - Hardcover

Rossnagel, Stephen M.; Westwood, William D.; Cuomo, Jerome J.

 
9780815512202: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

Synopsis

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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Review

"The text provides and excellent reference for plasma processing." - SAMPE Journal

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Other Popular Editions of the Same Title

9781493303359: Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions

Featured Edition

ISBN 10:  149330335X ISBN 13:  9781493303359
Publisher: William Andrew, 1991
Softcover