Diazonaphthoquinone-based Resists (Tutorial Texts in Optical Engineering) - Softcover

Ralph R. Dammel

Softcover

ISBN 10: 0819410195 ISBN 13: 9780819410191

Publisher: SPIE Publications, 1993

Synopsis

This book elucidates the reasons underlying the lasting success of DNQ/N resist systems by examining the correlation between the chemical structure of the components and the photoresist performance. The basic chemistries of both DNQ sensitizers and novolak resins are explored. Focus also is placed on the chemical basis of application-related facets of the lithographic process. Methods of increasing process performance, such as image reversal, top layer imaging, antireflection layers, and phase shift technology are treated.

Contents

- Preface to the Series
- Table of Contents
- Preface
- Introduction
- Basic Chemistry of DNQ/Novolak Resists
- Basic Chemistry of Novolaks
- DNQ/Novolak Interactions
- Step-by-step View of the Lithographic Process
- Advanced Processing Schemes for DNQ Resists
- Outlook on DNQ/Novolak Systems

Edition details

• Publisher: SPIE Publications
• Publication date: 1993
• ISBN 10: 0819410195
• ISBN 13: 9780819410191
• Binding: Paperback
• Language: English
• Number of pages: 216