Covers lithography process control at several levels, from fundamental through advanced topics. Self-contained tutorial works both as an introduction to the technology and as a reference for the experienced lithographer. Reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback.
- Introduction to the use of statistical process control in lithography
- Simple and complex processes
- Linewidth control
- Process drift and automatic process control
- Control of operations
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Book Description SPIE Publications, 1999. Paperback. Book Condition: New. Never used!. Bookseller Inventory # P110819430528
Book Description Society of Photo Optical, 1999. Paperback. Book Condition: Brand New. 190 pages. 10.25x7.25x0.50 inches. In Stock. Bookseller Inventory # 0819430528
Book Description SPIE Publications. PAPERBACK. Book Condition: New. 0819430528 New Condition. Bookseller Inventory # NEW7.0417510