Items related to Lithography Process Control (SPIE Tutorial Texts in...
Synopsis
Covers lithography process control at several levels, from fundamental through advanced topics. Self-contained tutorial works both as an introduction to the technology and as a reference for the experienced lithographer. Reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback.
Contents
- Preface
- Introduction to the use of statistical process control in lithography
- Sampling
- Simple and complex processes
- Linewidth control
- Overlay
- Yield
- Process drift and automatic process control
- Metrology
- Control of operations
"synopsis" may belong to another edition of this title.
- PublisherSPIE Publications
- Publication date1999
- ISBN 10 0819430528
- ISBN 13 9780819430526
- BindingPaperback
- LanguageEnglish
- Number of pages204
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Lithography Process Control
Published by
SPIE-International Society for Optical Engine, 1999
ISBN 10: 0819430528
ISBN 13: 9780819430526
Used
Paperback
Seller: ThriftBooks-Atlanta, AUSTELL, GA, U.S.A.
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Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28)
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Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28)
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Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28)
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