Synopsis
Covers lithography process control at several levels, from fundamental through advanced topics. Self-contained tutorial works both as an introduction to the technology and as a reference for the experienced lithographer. Reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback.
Contents
- Preface
- Introduction to the use of statistical process control in lithography
- Sampling
- Simple and complex processes
- Linewidth control
- Overlay
- Yield
- Process drift and automatic process control
- Metrology
- Control of operations
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Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28)
Seller: Goodwill of Silicon Valley, SAN JOSE, CA, U.S.A.
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Condition: good. Supports Goodwill of Silicon Valley job training programs. The cover and pages are in Good condition! Any other included accessories are also in Good condition showing use. Use can include some highlighting and writing, page and cover creases as well as other types visible wear. Seller Inventory # GWSVV.0819430528.G
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Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28)
Seller: BennettBooksLtd, San Diego, NV, U.S.A.
Seller rating 5 out of 5 stars
Paperback. Condition: New. In shrink wrap. Looks like an interesting title! Seller Inventory # Q-0819430528