Items related to Field Guide to Optical Lithography

Field Guide to Optical Lithography - Softcover

Chris A. Mack

 
9780819462077: Field Guide to Optical Lithography
Softcover
ISBN 10: 0819462071 ISBN 13: 9780819462077
Publisher: SPIE Publications, 2006

Synopsis

The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.

Contents

- Symbol Glossary
- The Lithgraphy Process
- Image Formation
- Imaging into a Photoresist
- Photoresist Chemistry
- Lithography Control and Optimization
- Equation Summary
- Glossary
- Index

"synopsis" may belong to another edition of this title.

Publisher
SPIE Publications
Publication date
2006
Language
English
ISBN 10 
0819462071
ISBN 13 
9780819462077
Binding
Spiral-bound
Edition number
1
Number of pages
136