Field Guide to Optical Lithography - Softcover

Chris A. Mack

Softcover

ISBN 10: 0819462071 ISBN 13: 9780819462077

Publisher: SPIE Publications, 2006

Synopsis

The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photoresist, photoresist chemistry, and lithography control and optimization. An introduction to next-generation lithographic technologies is also included, as well as an extensive lithography glossary and a summation of salient equations critical to anyone involved in the lithography industry.

Contents

- Symbol Glossary
- The Lithgraphy Process
- Image Formation
- Imaging into a Photoresist
- Photoresist Chemistry
- Lithography Control and Optimization
- Equation Summary
- Glossary
- Index

Edition details

• Publisher: SPIE Publications
• Publication date: 2006
• Language: English
• ISBN 10: 0819462071
• ISBN 13: 9780819462077
• Binding: Spiral-bound
• Edition number: 1
• Number of pages: 136