Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series) - Hardcover
Synopsis
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
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Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series)
Published by
American Chemical Society,, 1983
ISBN 10: 0841207755
ISBN 13: 9780841207752
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Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series)
Published by
American Chemical Society,, 1983
ISBN 10: 0841207755
ISBN 13: 9780841207752
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An Introduction to Microlithography by C Willson ACS Symposium 1983 HCDJ
Published by
American Chemical Society,, 1983
ISBN 10: 0841207755
ISBN 13: 9780841207752
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hardcover. Condition: Good. Seller Inventory # AP-021025-1574804
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Introduction to Microlithography: Theory, Materials, and Processing (ACS Symposium Series) (Volume 219)
Published by
American Chemical Society, 1983
ISBN 10: 0841207755
ISBN 13: 9780841207752
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Condition: Poor. Volume 219. This is an ex-library book and may have the usual library/used-book markings inside.This book has hardback covers. In poor condition, suitable as a reading copy. No dust jacket. Please note the Image in this listing is a stock photo and may not match the covers of the actual item,700grams, ISBN:0841207755. Seller Inventory # 7097958
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Introduction to Microlithography: Theory, Materials, and Processing: Based on a Workshop Sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, WA, March 20-25, 1983
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American Chemical Society Washington, DC 1983, 1983
ISBN 10: 0841207755
ISBN 13: 9780841207752
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363pp. 8vo Illustrated in black and white Terra cotta cloth Contributions by the editors and J.A. Mucha, D.W. Hess, and B.J. Linn. ACS Symposium Series 219 A few highlighted passages and notes else VG/no dj 0-8412-0775-5. Seller Inventory # 13824071503
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Introduction to Microlithography: Theory, Materials, and Processing (= Acs Symposium Series)
Published by
American Chemical Society, 1983
ISBN 10: 0841207755
ISBN 13: 9780841207752
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8° , Leinen. Condition: Sehr gut. 363 Seiten Ausgetragenes Bibliotheksexemplar, Buch ist in einem sehr guten Zustand, Leineneinband mit Titelprägung in Gold, Papier in sehr gutem Zustand. DE-10-18 Sprache: Englisch Gewicht in Gramm: 782. Seller Inventory # 1873636
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Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series)
Published by
American Chemical Society,, 1983
ISBN 10: 0841207755
ISBN 13: 9780841207752
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