Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series) - Hardcover
Synopsis
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
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Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series)
Published by
American Chemical Society,, 1983
ISBN 10: 0841207755
ISBN 13: 9780841207752
Used
Hardcover
Seller: HPB-Ruby, Dallas, TX, U.S.A.
Seller rating 5 out of 5 stars
hardcover. Condition: Very Good. Connecting readers with great books since 1972! Used books may not include companion materials, and may have some shelf wear or limited writing. We ship orders daily and Customer Service is our top priority! Seller Inventory # S_448347454
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Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series)
Published by
American Chemical Society, 1983
ISBN 10: 0841207755
ISBN 13: 9780841207752
Used
Hardcover
Seller: HPB-Red, Dallas, TX, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority! Seller Inventory # S_429576434
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Introduction to Microlithography: Theory, Materials, and Processing
Published by
American Chemical Society, 1983
ISBN 10: 0841207755
ISBN 13: 9780841207752
Used
Hardcover
Seller: BookDepart, Shepherdstown, WV, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: UsedGood. Hardcover; ACS Symposium Series 219; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983; light fading, light shelf wear to exterior; former owner's stamping on front end page and lower page edges; otherwise in very good condition with clean text and tight binding. Dust jacket shows fading, edge wear, and a few small tears. Seller Inventory # 74736
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Introduction to Microlithography: Theory, Materials, and Processing (ACS Symposium Series) (Volume 219)
Published by
American Chemical Society, 1983
ISBN 10: 0841207755
ISBN 13: 9780841207752
Used
Hardcover
Seller: Anybook.com, Lincoln, United Kingdom
Seller rating 5 out of 5 stars
Condition: Poor. Volume 219. This is an ex-library book and may have the usual library/used-book markings inside.This book has hardback covers. In poor condition, suitable as a reading copy. No dust jacket. Please note the Image in this listing is a stock photo and may not match the covers of the actual item,700grams, ISBN:0841207755. Seller Inventory # 7097958
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Introduction to Microlithography: Theory, Materials, and Processing (= Acs Symposium Series)
Published by
American Chemical Society, 1983
ISBN 10: 0841207755
ISBN 13: 9780841207752
Used
Hardcover
Seller: avelibro OHG, Dinkelscherben, Germany
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8° , Leinen. Condition: Sehr gut. 363 Seiten Ausgetragenes Bibliotheksexemplar, Buch ist in einem sehr guten Zustand, Leineneinband mit Titelprägung in Gold, Papier in sehr gutem Zustand. DE-10-18 Sprache: Englisch Gewicht in Gramm: 782. Seller Inventory # 1873636
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An Introduction to Microlithography - Theory, Materials, and Processing. (= ACS Symposium Series - Volume 219).
Published by
Amererican Chemical Society, Washington D.C., 1983
ISBN 10: 0841207755
ISBN 13: 9780841207752
Used
Hardcover
Seller: Antiquariat Silvanus - Inhaber Johannes Schaefer, Ahrbrück, Germany
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363 S. mit zahlreichen Abbildungen, Beiliegt: Der leicht beschädigte Original-Schutzumschlag. 0841207755 Sprache: Englisch Gewicht in Gramm: 620 Groß 8°, Original-Leine (Hardcover), Bibliotheks-Exemplar (Privatbibliothek) mit handschriftlicher Rückensignatur und kleinem Rückenschild, Stempel auf Titel und Schnitt, Einband in selbstklebende transparente Schutzfolie eingeschlagen, insgesamt gutes und innen sauberes Exemplar, Seller Inventory # 81404
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