Synopsis
Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing the basic concepts involved--liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.--this volume will be particularly useful in chemical engineering courses. It offers a framework within which specialized courses in microelectronics processing can be organized. In addition, it serves as a valuable reference source for all industrial engineers working with the individual process steps covered.
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Microelectronic Processing: Chemical Engineering Aspects (ACS Advances in Chemistry)
Published by
American Chemical Society, 1989
ISBN 10: 0841214751
ISBN 13: 9780841214750
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Hardcover
Seller: Goodwill of Silicon Valley, SAN JOSE, CA, U.S.A.
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Condition: acceptable. Supports Goodwill of Silicon Valley job training programs. The cover and pages are in Acceptable condition! Any other included accessories are also in Acceptable condition showing use. Use can include some highlighting and writing, page and cover creases as well as other types visible wear such as cover tears discoloration, staining, marks, scuffs, etc. All pages intact. Seller Inventory # GWSVV.0841214751.A
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MICROELECTRONICS PROCESSING: CHEMICAL ENGINEERING ACSAD 221
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Microelectronic Processing: Chemical Engineering Aspects (Acs Advances in Chemistry)
Published by
American Chemical Society, 1989
ISBN 10: 0841214751
ISBN 13: 9780841214750
New
Hardcover
Seller: SHIMEDIA, Brooklyn, NY, U.S.A.
Seller rating 5 out of 5 stars
Condition: New. Satisfaction Guaranteed or your money back. Seller Inventory # 0841214751