Introduction to Microlithography (ACS Professional Reference Book)

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9780841228481: Introduction to Microlithography (ACS Professional Reference Book)
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Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

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Published by American Chemical Society (1994)
ISBN 10: 0841228485 ISBN 13: 9780841228481
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Book Description AMER CHEMICAL SOC. Condition: Neu. Neu Neuware, Importqualität, Versand Büchersendung - Reviews the theory, materials and processes that are used in the lithographic process. It opens with a brief historical introduction to microlithography, and then discusses four major topics - the physics of the lithographic process, organic resist materials, resist processing and plasm etching.< Englisch. Seller Inventory # INF1000072502

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Larry F.;Bowden Thompson
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Book Description AMER CHEMICAL SOC. Condition: Neu. Neu Neuware, Importqualität, Versand Büchersendung - Reviews the theory, materials and processes that are used in the lithographic process. It opens with a brief historical introduction to microlithography, and then discusses four major topics - the physics of the lithographic process, organic resist materials, resist processing and plasm etching.< Englisch. Seller Inventory # INF1000072502

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Larry F. Thompson (Editor), C. Grant Willson (Editor), Murrae J. Bowden (Editor)
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Book Description American Chemical Society, 1994. Hardcover. Condition: New. 2. Seller Inventory # DADAX0841228485

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