Synopsis
Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.
"synopsis" may belong to another edition of this title.
Search results for Introduction to Microlithography (ACS Professional...
Stock Image
Introduction to Microlithography (ACS Professional Reference Book)
Published by
American Chemical Society (edition 2), 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
Used
Hardcover
Seller: BooksRun, Philadelphia, PA, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Good. 2. It's a preowned item in good condition and includes all the pages. It may have some general signs of wear and tear, such as markings, highlighting, slight damage to the cover, minimal wear to the binding, etc., but they will not affect the overall reading experience. Seller Inventory # 0841228485-11-1
Stock Image
Introduction to Microlithography (ACS Professional Reference Book)
Published by
American Chemical Society, 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
New
Hardcover
Seller: World of Books (was SecondSale), Montgomery, IL, U.S.A.
Seller rating 5 out of 5 stars
Condition: New. Seller Inventory # 00087956635
Stock Image
Introduction to Microlithography (ACS Professional Reference Book)
Published by
American Chemical Society, 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
Used
Hardcover
Seller: HPB-Red, Dallas, TX, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Good. Connecting readers with great books since 1972! Used textbooks may not include companion materials such as access codes, etc. May have some wear or writing/highlighting. We ship orders daily and Customer Service is our top priority! Seller Inventory # S_448673762
Stock Image
Intro Microlith 2ed Acspr C
Seller: ThriftBooks-Dallas, Dallas, TX, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Good. No Jacket. Pages can have notes/highlighting. Spine may show signs of wear. ~ ThriftBooks: Read More, Spend Less. Seller Inventory # G0841228485I3N00
Stock Image
Intro Microlith 2ed Acspr C
Seller: ThriftBooks-Dallas, Dallas, TX, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Very Good. No Jacket. May have limited writing in cover pages. Pages are unmarked. ~ ThriftBooks: Read More, Spend Less. Seller Inventory # G0841228485I4N00
Stock Image
Intro Microlith 2ed Acspr C
Seller: ThriftBooks-Atlanta, AUSTELL, GA, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Good. No Jacket. Pages can have notes/highlighting. Spine may show signs of wear. ~ ThriftBooks: Read More, Spend Less. Seller Inventory # G0841228485I3N00
Stock Image
Introduction to Microlithography
Published by
American Chemical Society, Washington, DC, 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
Used
Hardcover
Seller: Xochi's Bookstore & Gallery, Truth or consequences, NM, U.S.A.
Seller rating 3 out of 5 stars
Hardcover. Condition: Very Good. No Jacket. 2nd. 527pp.incl.index; HB blue w/white; some rub w/wear on edges; PONft.pastedwn.; clean,tight pgs. " . the physics of the lithographic process, organic resist materials, resist processing, and plasma etching." illus. Seller Inventory # 024349
Stock Image
Introduction to Microlithography (ACS Professional Reference Book)
Published by
American Chemical Society, 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
Used
Hardcover
Seller: The Mighty Book, Portland, OR, U.S.A.
Seller rating 4 out of 5 stars
Hardcover. Condition: Very Good. 2nd Edition. Gently read 2nd edition, with clean text, two creased page corners. Light wear to the pictorial cover. Ready to ship. Seller Inventory # H205
Stock Image
Introduction to Microlithography
Published by
Amer Chemical Society, Washington, D.C., U.S.A., 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
Used
Hardcover
Seller: Feldman's Books, Menlo Park, CA, U.S.A.
Seller rating 4 out of 5 stars
Hardcover. Condition: Fine. Second Edition. Seller Inventory # 00034181
Stock Image
Introduction to Microlithography. 2nd Edition.
Published by
Washington, D.C., U.S.A.: Amer Chemical Society, 1994
ISBN 10: 0841228485
ISBN 13: 9780841228481
Used
Hardcover
Seller: Rob the Book Man, Vancouver, WA, U.S.A.
Seller rating 4 out of 5 stars
Hardcover. Condition: Fine. 2nd Edition. Hardcover in fine condition. Seller Inventory # 4311