Polymeric Materials for Microelectronic Applications: Science and Technology (Acs Symposium Series) - Hardcover

Kobunshi Gakkai (Japan) Polymers For Microelectronics And Photonics Gr; American Chemical Society Division Of Polymeric Materials: Science And

 
9780841230552: Polymeric Materials for Microelectronic Applications: Science and Technology (Acs Symposium Series)

Synopsis

Reports recent developments in polymer science and technology pertinent to microelectronics. Addresses such topics as photophysics and radiation physics and chemistry of polymers; photoresists, electron beam resists, and X-ray resists; insulating materials in microelectronics; photoresponsive
materials; silicon-containing polymers; conducting polymers; and optoelectronic materials. Includes international contributions from both academia and industry.

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