Items related to Micro- and Nanopatterning Polymers (ACS Symposium Series)
Synopsis
Use of polymers is widespread in the electronics industry, both in manufacturing integrated circuits and as components in the completed devices. In addition to providing an update in conventional microlithography technology, Micro- and Nanopatterning Polymers describes new patterning techniques involving block copolymers, direct deposition of metal oxides and other materials, and image-wise chemical deposition. It illustrates the challenges and opportunities in designing ArF excimer laser resists in the next generation of lithographic technology. The book includes discussions of material design alternatives, acid generator chemistries, and acid diffusion mechanisms in chemically amplified resists, which have now replaced novolac/diazoquinone resists in device manufacturing. Providing insight into the most recent breakthroughs in nano-technology, this unique book is an important step in the development of integrated circuits.
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About the Author
Hiroshi Ito, IBM Almaden Research Center. Omkaram Nalamasu, both at Bell Laboratories, Lucent Technologies.
Review
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"About this title" may belong to another edition of this title.
- PublisherAmerican Chemical Society
- Publication date1998
- ISBN 10 0841235813
- ISBN 13 9780841235816
- BindingHardcover
- LanguageEnglish
- Number of pages400
- EditorIto Hiroshi, Reichmanis Elsa, Nalamasu Omkaram, Ueno Takumi
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Micro- and Nanopatterning Polymers (\Vol. 706) (ACS Symposium Ser., No. 706)
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Oxford University Press, Incorporated, New York, NY, U.S.A., 1998
ISBN 10: 0841235813
ISBN 13: 9780841235816
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Hard Cover. Condition: New. New. 386 pages. Consists of 27 papers presented at the 1997 ACS Polymeric Materials conference, focusing on micro- and nanopatterning. Seller Inventory # S7-008151
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Micro- and Nanopatterning Polymers (\Vol. 706) (ACS Symposium Series, No. 706)
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Micro- and Nanopatterning Polymers (\Vol. 706) (ACS Symposium Ser., No. 706)
Published by
Oxford University Press, Incorporated, New York, NY, U.S.A., 1998
ISBN 10: 0841235813
ISBN 13: 9780841235816
New
Hardcover
Seller: Book Booth, Berea, OH, U.S.A.
Seller rating 5 out of 5 stars
Hard Cover. Condition: New. New. Multiple copies available. Consists of 27 papers presented at the 1997 ACS Polymeric Materials conference, focusing on micro- and nanopatterning. Seller Inventory # S31-003947
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Micro- and Nanopatterning Polymers (\Vol. 706) (ACS Symposium Ser., No. 706)
Published by
Oxford University Press, Incorporated, New York, NY, U.S.A., 1998
ISBN 10: 0841235813
ISBN 13: 9780841235816
New
Hardcover
Seller: Book Booth, Berea, OH, U.S.A.
Seller rating 5 out of 5 stars
Hard Cover. Condition: New. New. Multiple copies available. Consists of 27 papers presented at the 1997 ACS Polymeric Materials conference, focusing on micro- and nanopatterning. Seller Inventory # S28-003667
Quantity: 1 available
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Micro- and Nanopatterning Polymers (\Vol. 706) (ACS Symposium Ser., No. 706)
Published by
Oxford University Press, Incorporated, New York, NY, U.S.A., 1998
ISBN 10: 0841235813
ISBN 13: 9780841235816
New
Hardcover
Seller: Book Booth, Berea, OH, U.S.A.
Seller rating 5 out of 5 stars
Hard Cover. Condition: New. New condition in original shrinkwrap. Multiple copies available. Consists of 27 papers presented at the 1997 ACS Polymeric Materials conference, focusing on micro- and nanopatterning. Seller Inventory # S53-008031
Quantity: 1 available
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Micro- and Nanopatterning Polymers (\Vol. 706) (ACS Symposium Ser., No. 706)
Published by
Oxford University Press, Incorporated, New York, NY, U.S.A., 1998
ISBN 10: 0841235813
ISBN 13: 9780841235816
New
Hardcover
Seller: Book Booth, Berea, OH, U.S.A.
Seller rating 5 out of 5 stars
Hard Cover. Condition: New. New. Multiple copies available. Consists of 27 papers presented at the 1997 ACS Polymeric Materials conference, focusing on micro- and nanopatterning. Seller Inventory # S29-003779
Quantity: 1 available
Stock Image
Micro- and Nanopatterning Polymers (\Vol. 706) (ACS Symposium Ser., No. 706)
Published by
Oxford University Press, Incorporated, New York, NY, U.S.A., 1998
ISBN 10: 0841235813
ISBN 13: 9780841235816
New
Hardcover
Seller: Book Booth, Berea, OH, U.S.A.
Seller rating 5 out of 5 stars
Hard Cover. Condition: New. New. Multiple copies are available. 386 pages. Consists of 27 papers presented at the 1997 ACS Polymeric Materials conference, focusing on micro- and nanopatterning. Seller Inventory # S55-008132
Quantity: 1 available
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Micro- and Nanopatterning Polymers (\Vol. 706) (ACS Symposium Ser., No. 706)
Published by
Oxford University Press, Incorporated, New York, NY, U.S.A., 1998
ISBN 10: 0841235813
ISBN 13: 9780841235816
New
Hardcover
Seller: Book Booth, Berea, OH, U.S.A.
Seller rating 5 out of 5 stars
Hard Cover. Condition: New. New. Multiple copies are available. 386 pages. Consists of 27 papers presented at the 1997 ACS Polymeric Materials conference, focusing on micro- and nanopatterning. Seller Inventory # S54-008060
Quantity: 1 available
Stock Image
Micro- and Nanopatterning Polymers (\Vol. 706) (ACS Symposium Ser., No. 706)
Published by
Oxford University Press, Incorporated, New York, NY, U.S.A., 1998
ISBN 10: 0841235813
ISBN 13: 9780841235816
New
Hardcover
Seller: Book Booth, Berea, OH, U.S.A.
Seller rating 5 out of 5 stars
Hard Cover. Condition: New. New. Multiple copies available. Consists of 27 papers presented at the 1997 ACS Polymeric Materials conference, focusing on micro- and nanopatterning. Seller Inventory # S22-003666
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Micro- and Nanopatterning Polymers
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American Chemical Society, 1998
ISBN 10: 0841235813
ISBN 13: 9780841235816
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