Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set - Hardcover

Madou, Marc J.

Hardcover

ISBN 10: 0849331803 ISBN 13: 9780849331800

Publisher: CRC Press, 2011

Synopsis

Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options.

The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.

About this title

About the Author

Marc J. Madou, University of California, Irvine USA.

Edition details

• Publisher: CRC Press
• Publication date: 2011
• Language: English
• ISBN 10: 0849331803
• ISBN 13: 9780849331800
• Binding: Hardcover
• Edition number: 3
• Number of pages: 1992