Items related to Fundamentals of Microfabrication
Synopsis
Fundamentals of Microfabrication is the first book to examine all aspects of the attempt to build functional devices at a molecular size. Ten chapters discuss in detail topics such as lithography, pattern transfer, wet and dry bulk micromachining, surface micromachining, and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are examined. Bonding and packaging issues are defined. The book also presents quantum structures and reviews molecular engineering. Numerous appendices offer valuable information in an easily accessible format.
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About the Author
University of California, Irvine, USA
Review
"... the alpha and omega textbook of micro and nanofabrication and technology. ... Madou’s explanations often provide new perspectives to those who are more experienced. ... this feat of compressing a half century of science and engineering into one set of books makes them useful for years to come. The volumes can easily and aptly serve as course resources for students or as reference books for professionals. Summing Up: Recommended."
―CHOICE Magazine
"... offers the widest and yet the most detailed coverage of all essential and fundamental aspects of microfabrication and nanotechnology. The author has done an excellent and remarkable job in synthesizing such diverse material under a single umbrella."
―Suman Chakraborty, IIT Kharagpur, India
"Once again, Professor Madou has made an incredible contribution to the MEMS/NEMS global community in writing this series of books."
―Nico de Rooij, Director, Institute of Microengineering, EPFL, Switzerland
"... [the new three-volume format] has the potential to become a 'classic' just like the one-volume predecessor... easy to read, and I found some concepts explained in ways I hadn’t heard before... Very ambitious, very informative, very good for teaching!"
―Jorg P. Kutter, Technical University of Denmark
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Fundamentals of Microfabrication
Published by
CRC Press (edition First Edition), 1997
ISBN 10: 0849394511
ISBN 13: 9780849394515
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Fundamentals of Microfabrication
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Fundamentals of Microfabrication
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Fundamentals of Microfabrication
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Fundamentals of Microfabrication
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Fundamentals of Microfabrication
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FUNDAMENTALS OF MICROFABRICATION
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FUNDAMENTALS OF MICROFABRICATION
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Fundamentals of Microfabrication
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Condition: Fair. This is an ex-library book and may have the usual library/used-book markings inside.This book has hardback covers. Clean from markings. In fair condition, suitable as a study copy. Please note the Image in this listing is a stock photo and may not match the covers of the actual item,1950grams, ISBN:9780849394515. Seller Inventory # 8959846
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Fundamentals of Microfabrication
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