Handbook of Microlithography, Micromachining and Microfabrication, Volume 1 (Materials and Devices Series, 1) - Hardcover

P. Rai-Choudhury

Hardcover

ISBN 10: 0852969066 ISBN 13: 9780852969069

Publisher: Institution Of Engineering And Technology, 1997

Synopsis

This authoritative handbook provides a comprehensive resource for process development and training, in both the microelectronics device manufacturing field and newer application areas, such as sensors, actuators and biomedical devices. The handbook is written by leading experts in the field, and may be used as a reference or text by researchers and engineers who are not expert in the area as well as a good reference for those who are.

Also available:

Electrical Degradation and Breakdown in Polymers - ISBN 9780863411960
Physics and Technology of Hetrojunction Devices - ISBN 9780863412042

The Institution of Engineering and Technology is one of the world's leading professional societies for the engineering and technology community. The IET publishes more than 100 new titles every year; a rich mix of books, journals and magazines with a back catalogue of more than 350 books in 18 different subject areas including:

-Power & Energy
-Renewable Energy
-Radar, Sonar & Navigation
-Electromagnetics
-Electrical Measurement
-History of Technology
-Technology Management

Edition details

• Publisher: Institution Of Engineering And Technology
• Publication date: 1997
• Language: English
• ISBN 10: 0852969066
• ISBN 13: 9780852969069
• Binding: Hardcover
• Number of pages: 776
• Editor: P. Rai-Choudhury