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Synopsis
A non-technical introduction to the field of microelectromechanical systems (MEMS). It describes in detail the materials used in producing MEMS - including silicon, polymers and glass and quartz substrates - as well as MEMS design for nozzles, sensors, valves and other applications. It examines the manufacture of commercial MEMS using technologies such as oxidation, lithography, chemical vapour deposition and silicon fusion bonding and applications in a wide range of industries including data storage, telecommunications, consumer, automotive, medical and defence. The book also addresses the future of MEMS - its potential for microelectrode arrays, actuators and optical switches and other technologies.
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About the Author
Nadim Maluf is head of research and development at NovaSensor in Fremont, California, and is Consulting Professor of Electrical Engineering at Stanford University.
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An Introduction to Microelectromechanical Systems Engineering
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Artech House Publishers, 2000
ISBN 10: 0890065810
ISBN 13: 9780890065815
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Introduction to Microelectromechanical Systems Engineering
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An Introduction to Microelectromechanical Systems Engineering
Published by
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ISBN 10: 0890065810
ISBN 13: 9780890065815
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An Introduction to Microelectromechanical Systems Engineering
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ISBN 10: 0890065810
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An Introduction to Microelectromechanical Systems Engineering
Published by
Artech House Publishers, 2000
ISBN 10: 0890065810
ISBN 13: 9780890065815
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An Introduction to Microelectromechanical Systems Engineering
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An Introduction to Microelectromechanical Systems Engineering (Artech House Mems Library)
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An Introduction to Microelectromechanical Systems Engineering
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ISBN 10: 0890065810
ISBN 13: 9780890065815
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