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This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes.
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Book Description Artech House, 1994. Hardcover. Condition: New. Seller Inventory # DADAX0890067074
Book Description Artech House, 1994. Condition: New. book. Seller Inventory # M0890067074
Book Description Artech House, 1994. Condition: New. book. Seller Inventory # MB00FWB1KGU
Book Description Artech House, 1994. Hardcover. Condition: New. Never used!. Seller Inventory # P110890067074
Book Description Condition: New. This is Brand NEW. Seller Inventory # Asian-16102018-2219
Book Description Artech House Publishers, 1994. Hardcover. Condition: New. Ships with Tracking Number! INTERNATIONAL WORLDWIDE Shipping available. Buy with confidence, excellent customer service!. Seller Inventory # 0890067074n