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Computational Modeling in Semiconductor Processing (Artech House Materials Science Library) - Hardcover
Synopsis
This text provides coverage of the models, governing equations and numerical techniques suitable for process simulation. It concentrates on such areas as chemical vapour deposition, metal-organic chemical vapour deposition, plasma processing, rapid thermal processing and crystal growth, as well as defining the basic principles of transport phenomena, gas phase and surface reactions in electronics materials processing. In addition, it explains how to apply practical numerical techniques used in process simulation, and presents the numerical methods necessary to produce simulation codes.
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- PublisherArtech House Publishers
- Publication date1994
- ISBN 10 0890067074
- ISBN 13 9780890067079
- BindingHardcover
- LanguageEnglish
- Number of pages363
- EditorMeyyappan M
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Computational Modeling in Semiconductor Processing (Artech House Materials Science Library)
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Artech House Publishers, 1994
ISBN 10: 0890067074
ISBN 13: 9780890067079
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