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Polymers for microelectronics: Science and technology : proceedings of the International Symposium on Polymers for Microelectronics: Science and ... Tokyo, Japan, October 29 to November 2, 1989 - Hardcover
Synopsis
In this book, an international team of authors from both industrial and academic research consider recent progress in polymers for microelectronics. They offer detailed coverage of
* fundamental and applied research on resists and related compounds * polyimides and other functional polymers for microelectronics * new photoresponsive polymers for optical memory and related applications.
Chemists and physicists active in this field will find here an exhaustive state-of-the-art report on one of the key elements of advanced technologies.
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